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灵活的混合集成大厅角度传感器与CMOS过程兼容

Ye Luo1,2, Youtong Fang1, Yang Lv2

  • 1College of Electrical Engineering, Zhejiang University, Hangzhou 310058, China.

Sensors (Basel, Switzerland)
|February 13, 2025
PubMed
概括
此摘要是机器生成的。

灵活的混合集成角度传感器是使用补充金属氧化物半导体 (CMOS) 技术开发的. 这些强大的传感器在曲时保持稳定的灵敏度,显示出灵活电子应用的前景.

关键词:
在ASIC的基础上,ASIC是ASIC.这是一个CMOS系统.大厅传感器的传感器灵活的传感器灵活的传感器

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科学领域:

  • 材料科学 材料科学 材料科学
  • 电气工程 电气工程
  • 传感器技术 传感器技术

背景情况:

  • 基于的Hall应用特定集成电路 (ASIC) 芯片因其在电子和传感器件中的成功而被广泛使用.
  • 灵活的电子设备需要强大的传感器组件,能够承受机械应力.

研究的目的:

  • 设计,模拟和测试使用互补金属氧化物半导体 (CMOS) 技术的灵活混合一体化角度传感器.
  • 为了评估这些传感器在机械应变下的柔性基板上的性能和稳定性.

主要方法:

  • 在100微米厚的柔性聚胺 (PI) 膜上制造霍尔传感器.
  • 使用CMOS技术集成的传感器的设计和模拟.
  • 在各种曲条件下测试传感器的灵敏度和稳定性 (最小半径10毫米,100个曲周期).

主要成果:

  • 灵活的霍尔传感器达到0.205V/mT的灵敏度.
  • 在曲到半径为10毫米后,传感器的灵敏度保持稳定.
  • 在100个曲周期中观察到一致的性能,证明了耐用性.

结论:

  • 使用CMOS技术制造的灵活混合集成角度传感器可用于工业应用.
  • 开发的传感器表现出卓越的机械稳定性和一致的性能,使它们成为灵活的电子和传感器设备的前景.