离散铁电极化切换在纳米级氧化物通道铁电场效应晶体管中的切换
Yanjie Shao1, Elham Rafie Borujeny1, Jorge Navarro Fidalgo1
1Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States.
Nano letters
|February 13, 2025
概括
本研究探讨了氧化物 (HZO) 晶体管中的铁电 (FE) 切换. 缩放通道厚度增强了内存窗口 (MW),揭示了FE域固定影响性能.
科学领域:
- 材料科学 材料科学 材料科学
- 固态物理 固态物理
- 纳米技术 纳米技术
背景情况:
- 铁电材料对于非挥发性存储器设备至关重要.
- 缩小铁电场效应晶体管 (FeFET) 在理解偏振切换行为方面存在挑战.
- 氧化 (HZO) 是先进FeFET的一个有前途的材料.
研究的目的:
- 在缩放的HZO FeFET中研究极化切换动态.
- 了解频道缩放对内存窗口 (MW) 增强的影响.
- 在纳米尺度上探究铁电物理,直到铁电 (FE) 领域水平.
主要方法:
- 使用无形的氧化通道制造HZO FeFET.
- 系统地调整通道厚度和长度.
- 对偏振切换行为和记忆窗口的描述.
- 对疲劳对设备性能影响的分析.
主要成果:
- 频道厚度缩放,特别是2.5nm,显著提高了内存窗口 (MW) 的高达2.2V.
- 在纳米级晶体管中观察到的离散铁电极化切换表明了一些FE域的参与.
- 在HZO中估计的铁电域大小大约为40nm.
- 疲劳实验表明,FE域固定是导致负值电压转移和MW退化的主要因素.
结论:
- 频道厚度缩放是改善HZO FeFET中MW的有效策略.
- 纳米级FeFETs允许观察离散的FE域切换,使基本物理研究成为可能.
- FE域固定是限制缩放 HZO FeFET 的性能和可靠性的关键机制.
- 这项工作为单个领域层面的 FE 物理提供了洞察力,这对未来的设备设计至关重要.
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