倒立金字塔3轴霍尔效应磁传感器,具有偏移取消的磁传感器
Jacopo Ruggeri1, Udo Ausserlechner2, Helmut Köck2
1Department of Microelectronics, Delft University of Technology, 2628 CD, Delft, The Netherlands.
Microsystems & nanoengineering
|February 14, 2025
概括
本研究介绍了一种使用MEMS和CMOS技术的新型3轴霍尔效应传感器. 创新的反转金字塔设计提供了精确的磁场检测与减少偏移,使其非常适合各种电子应用.
科学领域:
- 微电子工程 微电子工程
- 固态物理 固态物理
- 传感器技术 传感器技术
背景情况:
- 霍尔效应设备由于其可靠性,低成本和CMOS兼容性而主导磁传感器市场.
- 现有的3轴磁传感器可能是复杂和昂贵的.
- 需要紧,高性能的3轴磁传感器.
研究的目的:
- 为了引入一个新的3轴霍尔效应传感器元件.
- 为了证明其检测平面内和平面外磁场的能力.
- 使用电流旋转方法展示显著的偏移减少.
主要方法:
- 使用MEMS微加工和CMOS处理来创建一个反转的金字塔结构.
- 使用TMAH蚀刻和n-dopant植入来定义主动传感器区域.
- 实施各种偏差感知检测模式和电流旋转方法以减少偏移.
主要成果:
- 这种新型传感器有效地检测到单一结构中的平面内和平面外磁场.
- 实现了1到3个数量级的抵消减小.
- 证明了高灵敏度:64.1-198 V A-1 T-1 (与电流相关) 和14.8-21.4 mV V-1 T-1 (与电压相关),交叉通话低于4.7%.
结论:
- 开发的3轴霍尔效应传感器为当前最先进的设备提供了更简单,更有前途的替代方案.
- 它的高性能和减少的偏移使其适合精确的磁场传感.
- 潜在的应用包括汽车,工业和消费电子产品的位置反和功率监测.
相关概念视频
The Hall Effect
2.2K
Edwin H. Hall, in the year 1879, devised an experiment that could be used to identify the polarity of the predominant charge carriers in a conducting material. From a historical perspective, this experiment was the first to demonstrate that the charge carriers in most metals are negative.
2.2K
Magnetic Damping
415
Eddy currents can produce significant drag on motion, called magnetic damping. For instance, when a metallic pendulum bob swings between the poles of a strong magnet, significant drag acts on the bob as it enters and leaves the field, quickly damping the motion.
If, however, the bob is a slotted metal plate, the magnet produces a much smaller effect. When a slotted metal plate enters the field, an emf is induced by the change in flux; however, it is less effective because the slots limit the...
If, however, the bob is a slotted metal plate, the magnet produces a much smaller effect. When a slotted metal plate enters the field, an emf is induced by the change in flux; however, it is less effective because the slots limit the...
415
Magnetic Field Due To A Thin Straight Wire
4.7K
Consider an infinitely long straight wire carrying a current I. The magnetic field at point P at a distance a from the origin can be calculated using the Biot-Savart law.
4.7K
Magnetic Field Due to Two Straight Wires
2.3K
Consider two parallel straight wires carrying a current of 10 A and 20 A in the same direction and separated by a distance of 20 cm. Calculate the magnetic field at a point "P2", midway between the wires. Also, evaluate the magnetic field when the direction of the current is reversed in the second wire.
2.3K
Magnetic Field Of A Current Loop
4.3K
Consider a circular loop with a radius a, that carries a current I. The magnetic field due to the current at an arbitrary point P along the axis of the loop can be calculated using the Biot-Savart law.
4.3K
Magnetic Field of a Solenoid
3.7K
A solenoid is a conducting wire coated with an insulating material, wound tightly in the form of a helical coil. The magnetic field due to a solenoid is the vector sum of the magnetic fields due to its individual turns. Therefore, for an ideal solenoid, the magnetic field within the solenoid is directly proportional to the number of turns per unit length and the current. Conversely, the magnetic field outside the solenoid is zero.
Consider a solenoid with 100 turns wrapped around a cylinder of...
Consider a solenoid with 100 turns wrapped around a cylinder of...
3.7K


