前体剂量对使用原子层沉积形成的AZO/AlO堆表面被动化的影响
Yan Wang1, Theodore D C Hobson1, Jack E N Swallow1
1Department of Materials, University of Oxford Oxford OX1 3PH UK sebastian.bonilla@materials.ox.ac.uk.
概括
无的配氧化 (AZO) 薄膜为太阳能电池提供了出色的表面被动化. 这一进步对于可扩展制造高效光伏设备至关重要.
科学领域:
- 材料科学 材料科学 材料科学
- 太阳能光伏发电是如何实现的
- 半导体设备物理 半导体设备物理
背景情况:
- 高效的太阳能电池,包括异质连接 (SHJ) 和矿/联体,依赖于透明导电氧化物 (TCO).
- 对太瓦级光伏 (PV) 制造的需求需要开发无的TCO,以实现先进太阳能电池设计的经济高效的大规模生产.
- 添加氧化物 (AZO) 是一个有前途的无TCO候选物,因为它的透明度,导电性和表面被动化潜力.
研究的目的:
- 通过原子层沉积 (ALD) 沉积的氧化物 (AZO) 和氧化物 (AlO) 堆来证明异常的表面被动化.
- 分析ALD前体剂量对用于太阳能电池应用的AZO薄膜性能的影响.
- 评估无的AZO薄膜作为高效率太阳能电池中传统含TCOs的替代品的潜力.
主要方法:
- 使用原子层沉积 (ALD) 沉积AZO/AlO堆,精确控制前体剂量.
- AZO薄膜的全面表征,包括结构,组成和化学分析.
- 通过测量和电流密度 (J0) 和暗示开路电压 (iVoc) 来评估表面被动化质量.
- 在单连接异连接 (SHJ) 太阳能电池架构中的AZO膜的光学建模.
主要成果:
- 通过AZO/AlO堆实现了特殊的表面被动化,产生了低于1 fA cm-2的和电流密度 (J0) 和740 mV的暗示开通电路电压 (iVoc).
- 证明被动化性能严重依赖和度之间的相互作用,强调需要精确的ALD过程控制.
- 光学建模表明,开发的AZO薄膜的性能与SHJ太阳能电池中含的高流动性TCO相提并论.
结论:
- 用ALD沉积的AZO/AlO堆提供了出色的表面被动化,这是高效太阳能电池的关键要求.
- 精确控制ALD前体剂量对于优化AZO薄膜的被动性质至关重要.
- 无的AZO为基于的TCO提供了可行的替代方案,这对于下一代太阳能技术的可扩展制造至关重要.
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