控制相位的金属有机化学蒸汽沉积 晶圆尺度的二化的增长

Bum Jun Kim1,2, Derick Tseng1, David Dang3

  • 1Department of Materials Science and Engineering, University of California Berkeley, Berkeley, California 94720, United States.

ACS nanoscience Au
|February 24, 2025
PubMed
概括

这项研究表明,金属有机化学蒸汽沉积 (MOCVD) 增长温度如何控制晶圆尺度二维材料的二化 (MoTe2) 阶段. 精确的温度控制是设计电子设备的MoTe2相的关键.

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