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β-Ga₂O₃ 通过无机Sol-Gel旋转涂层薄膜:制备和表征

Hai Zhang¹, Dingyuan Niu¹, Junbiao Yang¹

¹School of Science, Inner Mongolia University of Technology, Hohhot 010051, China.

Nanomaterials (Basel, Switzerland)

|February 25, 2025

概括

这项研究提出了一种具有成本效益的方法,用于制备高质量的β-氧化物 (β-Ga₂O₃) 薄膜,使用旋转涂层. 开发的技术产生了具有优良光学性能的薄膜,适合光电子应用.

科学领域:

材料科学材料科学材料科学
凝聚物质物理学凝聚物质物理学
纳米技术纳米技术

背景情况:

贝塔氧化物 (β-Ga₂O₃) 是UV探测器和高功率电子产品的一种有前途的超宽带间隔半导体.
具有成本效益的,大面积的β-Ga₂O₃薄膜制造仍然是工业应用的重大挑战.

研究的目的:

开发一种低成本,高效的方法来生产高质量的β-Ga₂O₃薄膜.
研究通过无机溶液反应和旋转涂层制备的β-Ga₂O₃膜的结构,形态和光学特性.

主要方法:

用无机溶液反应合成β-Ga₂O₃薄膜,然后在蓝宝石和石英基板上进行旋转涂层.
片在不同温度下进行了化后处理.
描述涉及X射线衍射 (XRD),扫描电子显微镜 (SEM) 和UV-Vis光谱光度.

主要成果:

优化的旋转涂层循环 (十) 和800°C的化,在蓝宝石上产生了更光滑的β-Ga₂O₃薄膜,具有首选的[-201]方向.
在波长超过400纳米的波段中,片表现出高透射率 (>85%).
对于在蓝宝石基板上分别在800°C和1000°C冷的薄膜,测量了4.8 eV和4.98 eV的带隙.

结论:

与石英相比,蓝宝石基板对高质量的β-Ga₂O₃膜生长具有优越的兼容性.
开发的自旋涂层方法为制造用于光电子设备的β-Ga₂O₃膜提供了一种具有成本效益和可扩展的方法.

关键词:

乐队间隔乐队间隔乐队间隔无机溶液反应反应是无机溶液的反应.螺旋涂层的使用方法传输率传输率传输率这就是β-Ga2O3的含量.

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