一个可集成的声学微,基于基板上的尖端微柱阵列的共振
Yu Zhang1, Zeyi Wang1, Yang Zhao1
1Key Laboratory of Modern Acoustics (MOE), School of Physics, Collaborative Innovation Centre of Advanced Microstructures, Nanjing University, Nanjing 210093, China. dzhang@nju.edu.cn.
这项研究介绍了一种使用共振微柱和超声波传感器的新型声学微. 它实现了高压和高流速,为芯片实验室系统提供了可靠的解决方案.
科学领域:
- 微流体学 微流体学
- 声学流体学 声学流体学
- 在MEMS MEMS中使用.
背景情况:
- 微流体系统需要可靠和集成的抽水解决方案.
- 现有的声波驱动微往往缺乏实用性和可集成性.
- 对高效的芯片上技术的需求正在增加.
研究的目的:
- 开发一种具有增强性能的新型声学微型.
- 为了证明拟议的微型设计的实用性和可集成性.
- 为了评估微适用于芯片上的实验室应用的适用性.
主要方法:
- 在充满流体的通道内利用基板上的尖端微柱.
- 采用了一个活塞超声波传感器用于声波生成.
- 在5Vp-p的驱动电压下以80.5kHz的频率运行微.
主要成果:
- 在直通道 (12x0.6x0.2 mm3) 中实现了16.2μL min-1的流量.
- 产生了超过1.3kPa的压,明显高于以前的设计.
- 成功地将两个微集成到一个声流体粒子分离装置中.
结论:
- 开发的声学微提供了高压,快速响应和可靠性.
- 这种微型是集成到芯片实验室系统的有希望的候选者.
- 该设计解决了对实用和高效的微流体送解决方案的需求.
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