预充电的崩模式电容微加工超声波传感器 (CMUT) 接收器,用于高效的功率传输
概括
具有嵌入式充电存储层的电容微机超声波传感器 (CMUT) 消除了对外部偏移电压的需求. 化 (Si3N4) 和更厚的介电层提高了无线电力传输应用的性能.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 生物医学工程 生物医学工程
背景情况:
- 容量微加工超声波传感器 (CMUT) 对植入式设备来说比传统的酸酸传感器 (PZT) 有优势.
- 消除CMUTs对外部偏移电压的要求对于设备小型化和集成至关重要.
研究的目的:
- 为了评估血增强化学蒸汽沉积 (PECVD) Si3N4和原子层沉积 (ALD) Al2O3作为电荷储存层材料.
- 研究介电层厚度对CMUT作为无线电力传输 (WPT) 接收器的性能的影响.
主要方法:
- 容量电压 (CV) 测量以评估电荷存储容量.
- 动态加速寿命传输 (TX) 模式测试用于电荷捕获和保留分析.
- 电阻测量和同等电路建模用于功率转换效率预测.
主要成果:
- 与Al2O3.3.4相比,Si3N4显示出更高的电荷储存能力.
- 一个更厚的介电层 (Bdiel) 增强了电荷的捕获和保留.
- 模拟和实验显示,功率转换效率超过80%,在1和2.4MHz的最佳负载匹配下.
结论:
- 具有嵌入式充电存储层的CMUT对于无线电力传输应用是可行的.
- 材料选择 (Si3N4) 和介电体厚度对于优化CMUT性能至关重要.
- 最佳的CMUT变体选择应考虑电荷保留时间以及功率转换效率.
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