在芯片上,近红外多气体传感使用石化抗共振空心波导
Yuting Min1, Mingquan Pi1, Zihang Peng1
1State Key Laboratory of Integrated Optoelectronics, JLU Region, Jilin University, Changchun 130012, China. baix@jlu.edu.cn.
Lab on a chip
|March 4, 2025
概括
我们开发了新型的反共振反射光学波导 (ARROW) 气体传感器,使用了素化物材料. 这些传感器提供极化不敏感,芯片上的红外光谱气体检测,具有高灵敏度和多气体能力.
科学领域:
- 光电学是指光电子产品.
- 化学传感器 化学传感器
- 材料科学 材料科学 材料科学
背景情况:
- 芯片上的红外光谱气体传感对于环境监测和工业应用至关重要.
- 传统的空心反共振反射光学波导 (ARROW) 面临着制造挑战和偏振依赖,限制了它们的实际使用.
研究的目的:
- 提出和演示一种新的ARROW气体传感器制造方法,使用石化 (ChG) 反共振层.
- 为了研究开发的ARROW传感器的极化特性和气体传感性能.
主要方法:
- 两个ARROW气体传感器 (WG_A和WG_B) 的制造,采用热蒸发和环氧树脂粘合的CHG层.
- 测量极化特征和以 (C2H2) 传感性能在1.532微米.
- 对C2H2和甲 (CH4) 的宽带多气体检测能力的验证.
主要成果:
- 具有对称四面反共振结构的WG_A传感器证明了极化不敏感的操作.
- 对C2H2的高外部封闭因子 (ECF) 达到71%和检测极限 (LoD) 为~23ppm.
- 成功检测到1.532微米的C2H2和1.654微米的CH4,证实了宽带传感.
结论:
- 拟议的基于CHG的ARROW传感器提供了与传统方法相比简化的制造过程.
- 极化不敏感的WG_A传感器增强了集成芯片传感系统的稳定性和可靠性.
- 箭头显示出开发紧,灵敏和多功能芯片上多气体传感平台的巨大潜力.
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