相关实验视频
Updated: May 5, 2026

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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
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关于SAW共振器中的损失机制的研究,使用全3DFEM的42LT薄板,使用层次级级级联技术进行了全3DFEM
概括
这项研究研究了高性能表面声波 (IHP SAW) 共振器中的损失机制. 由于在平面上的衍射,斜SAW泄漏显著降低了共振器质量因子 (Q),即使在高指数对数下也是如此.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 声学 声学 在声学方面
背景情况:
- 表面声波 (SAW) 共振器对于电子设备至关重要.
- 了解损失机制对于提高共振器性能至关重要.
- 在LiTaO3/SiO2/Si基板上的高性能共振器面临着独特的挑战.
研究的目的:
- 调查和识别IHP SAW共振器中的主要损失机制.
- 为了将计算和测量的共振器性能指标相关联.
- 了解结构参数对共振器质量的影响.
主要方法:
- 使用完整的3D有限元素方法 (FEM) 与等级级级技术 (HCT).
- 分析的表面声波 (SAW) 场分布来源于FEM.
- 应用了修改后的Butterworth-van Dyke (mBVD) 模型进行定量表征.
主要成果:
- 在FEM计算和有效机电合因子的测量和Bode Q.之间取得了很好的一致性.
- 确定了反射器总线区域的斜 SAW 泄漏作为关键丢失机制.
- 证明在平面上的衍射显著影响反共振Q,即使有众多的IDT指对.
结论:
- 由平面内衍射引起的斜 SAW 泄漏是这些共振器中 Bode Q 减少的主要因素.
- mBVD模型有效地描述了在平面上的SAW衍射损失.
- 即使在具有大量IDT指对 (N_I = 100) 的共振器中,来自平面内衍射的损失仍然很大.
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