Jove
Visualize
联系我们
JoVE
x logofacebook logolinkedin logoyoutube logo
关于 JoVE
概览领导团队博客JoVE 帮助中心
作者
出版流程编辑委员会范围与政策同行评审常见问题投稿
图书馆员
用户评价订阅访问资源图书馆顾问委员会常见问题
研究
JoVE JournalMethods CollectionsJoVE Encyclopedia of Experiments存档
教育
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab Manual教师资源中心教师网站
使用条款与条件
隐私政策
政策

相关概念视频

您也可能阅读

相关文章

通过共同作者、期刊和引用图与本文相关的文章。

排序
Same author

Significance of multi-task deep learning neural networks for diagnosing clinically significant prostate cancer in plain abdominal CT.

Frontiers in oncology·2025
Same author

Pathogenic Bacteria Detection in Parasitic Fleas - Jiangxi Province, China, 2023.

China CDC weekly·2025
Same author

Preparation of Chitooligosaccharides with Specific Sequence Arrangement and Their Effect on Inducing Salt Resistance in Wheat Seedlings.

Polymers·2025
Same author

Isolation and molecular characteristic of subgroup J avian leukosis virus in Guangxi and Jiangsu provinces of China during 2022-2023.

Poultry science·2025
Same author

Development of <sup>18</sup>F-Labeled Deuterated Tropane Derivatives with High Metabolic Stability for PET Imaging of the Dopamine Transporter.

Molecular imaging and biology·2025
Same author

Therapeutic applications of exercise in neurodegenerative diseases: focusing on the mechanism of SIRT1.

Molecular and cellular biochemistry·2025
Same journal

Active devices and systems for closed-loop neuromodulation.

Microsystems & nanoengineering·2026
Same journal

An automated, digital immunoassay on a microfluidic cartridge for on-demand cytokine profiling.

Microsystems & nanoengineering·2026
Same journal

An integrated framework TSV-INet for arbitrarily distributed TSV interposer wafer warpage simulation.

Microsystems & nanoengineering·2026
Same journal

Mechanistic insights into cellular deformation enable enhanced extensional-flow cytometry for label-free classification and sorting.

Microsystems & nanoengineering·2026
Same journal

AlGaN/GaN HEMT H₂ sensor with integrated Wheatstone bridge and on-chip microheater for 0.1-ppm detection.

Microsystems & nanoengineering·2026
Same journal

Fully flexible large-area MEMS-based triaxial force sensor compatible with flat panel display manufacturing.

Microsystems & nanoengineering·2026
查看所有相关文章

相关实验视频

Updated: May 24, 2025

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
09:45

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

Published on: June 12, 2018

9.6K

激光干扰光刻图模式阵列的全球对齐参考策略.

Xiang Gao1, Jingwen Li1,2, Zijian Zhong1

  • 1Shenzhen International Graduate School, Tsinghua University, University Town of Shenzhen, Shenzhen, 518055, Guangdong, China.

Microsystems & nanoengineering
|March 4, 2025
PubMed
概括
此摘要是机器生成的。

一个新的全球对齐策略克服了使用激光干扰光刻法制造大面积格子的局限性. 这种方法确保了相位,周期和倾斜在大型基板上的精确对齐,用于先进的工程应用.

更多相关视频

Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments
06:40

Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments

Published on: January 28, 2021

4.3K
Control of Cell Geometry through Infrared Laser Assisted Micropatterning
11:04

Control of Cell Geometry through Infrared Laser Assisted Micropatterning

Published on: July 10, 2021

3.4K

相关实验视频

Last Updated: May 24, 2025

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
09:45

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

Published on: June 12, 2018

9.6K
Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments
06:40

Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments

Published on: January 28, 2021

4.3K
Control of Cell Geometry through Infrared Laser Assisted Micropatterning
11:04

Control of Cell Geometry through Infrared Laser Assisted Micropatterning

Published on: July 10, 2021

3.4K

科学领域:

  • 纳米技术和材料科学 材料科学
  • 光学工程是指光学工程.
  • 计量学 计量学 计量学

背景情况:

  • 大面积网格是各种工程领域的必不可少的组件.
  • 传统的干扰光刻法方法在大面积制造中面临挑战,原因是光圈尺寸限制.

研究的目的:

  • 提出和演示一种用于制造大面积激光干扰光刻 (LIL) 图案阵列的新方法.
  • 为了在整个图案区域中实现相位,周期和倾斜角度的精确全球对齐.

主要方法:

  • 实施全球对齐参考策略,使用两个参考网格 (一个独立的,一个固定的).
  • 通过交替光束和基板运动来调整曝光面积,以实现精确的控制.
  • 在大型基板上制造3x3格子阵列.

主要成果:

  • 成功制造了一个具有高精度对齐的大面积格子阵列.
  • 使用Fizeau干扰仪进行实验验证,显示连续的-1级衍射波面.
  • 展示干扰光刻图图案阵列的所有区域的有效和高效对齐.

结论:

  • 拟议的全球调整战略有效地克服了大面积格子制造的局限性.
  • 这种技术为在大基板上制造周期性结构提供了高精度和效率.
  • 该方法可以通过基板旋转来创建各种周期结构.