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使用Imino/Imido二硫酸光酸发电机结合的聚合物电阻增强了石版性能

Yue Liu¹, Dong Wang², Haihua Wang¹

¹National Engineering Research Center for Colloidal Materials, School of Chemistry and Chemical Engineering, Shandong University, Jinan, 250100, China.

Small (Weinheim an der Bergstrasse, Germany)

|March 5, 2025

概括

化学放大光电阻 (CARs) 面临着酸扩散的挑战. 这项研究开发了新的PAG结合共聚合物,可以减少扩散,改善高级光刻画的分辨率和粗度.

科学领域:

材料科学材料科学材料科学
有机化学有机化学
纳米技术纳米技术

背景情况:

化学放大光电阻 (CARs) 对于先进的光刻技术至关重要.
暴露后烤期间的酸扩散限制了分辨率,线边粗度和灵敏度 (RLS).

研究的目的:

开发新的基功能化 imino/imido二硫酸光酸生成器 (PAG).
通过将PAG集成到聚合物骨干中,创建单组件CAR,解决RLS挑战.

主要方法:

合成的新型基功能化伊米诺/伊米多二硫酸PAG.
与烯酸盐/甲烯酸盐共聚化PAG衍生物,形成PAG结合的共聚物.
评估了单元CAR在电子束和紫外线光刻画中的性能.

主要成果:

与PAG结合的共聚物通过产生长链硫酸,有效地减少了酸扩散.
单组件CAR显示出更高的分辨率和线边粗度.
在73μC cm-2.2的电子束剂量下,达到42nm的最小线宽.

结论:

开发的可聚合PAG和单组件CAR为先进光刻中RLS问题提供了可行的解决方案.
这种方法为下一代光电阻提供了合理的设计.

关键词:

与PAG结合的聚合物化学增强的光电阻.电子束 lithography 电子束 lithography 电子束 lithography 电子束 lithography 电子束 lithography 电子束 imino/imido 二硫酸是什么意思光酸发生器光酸发生器

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