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Updated: May 24, 2025

Fabrication of a Dipole-assisted Solid Phase Extraction Microchip for Trace Metal Analysis in Water Samples
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在半导体制造中使用的强酸和基中ppb级金属的定量本地特异化

Po-Jui Su1, Will Leung1, Chih-Jung Shen1

  • 1Department of Chemical Engineering, National United University, Miaoli, 360302, Taiwan, ROC.

Talanta
|March 5, 2025
PubMed
概括

本研究引入了一种使用突破曲线 (BTC) 理论和ICP-MS来量化溶剂中的金属特异性的新方法,这对于半导体制造至关重要. 该技术可以准确识别微量金属物种,改善净化过程控制.

关键词:
突破曲线 (BTC) 是一个突破曲线.感应合的等离子体质谱学 (ICP-MS)离子交换树脂是一种离子交换树脂.本地物种化原生物种化.一种物种的转变.微量金属的痕迹可以看到.

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