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Updated: May 24, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

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对静电驱动的MEMS微镜阵列进行电容电压研究

Jiahao Chen1, Xiaohui Yang1, Mustaqim Siddi Que Iskhandar2

  • 1Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.

Micromachines
|March 6, 2025
PubMed
概括

这项研究分析了微镜阵列,用于智能日光控制. 更高的材料刚度和初始倾斜角度增加了关闭值电压,优化了绿色建筑中的能源管理.

关键词:
MEMS微镜阵列中的微镜阵列.电容电压 (C-V) 的测量.电静电驱动的启动方式链结构 链结构开始的倾斜角度.拉入电压的拉入电压.

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相关概念视频

MOS Capacitor01:25

MOS Capacitor

A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...
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