环形MEMS快门阵列中电机学和光学特征的同质性,用于干扰显微镜的子场定位

Philipp Kästner1, Basma Elsaka1, Mustaqim Siddi Que Iskhandar2

  • 1Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich- Plett-Straße 40, 34132 Kassel, Germany.

Micromachines
|March 6, 2025
PubMed
概括

本研究介绍了一种用于先进微光学的微电机械系统 (MEMS) 环式快门. 该设备表现出稳定,无交叉通话的操作,响应时间低于40μs,适合干扰显微镜.