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在RF-MEMS方面的进展.

R Niall Tait1

  • 1Department of Electronics, Carleton University, Ottawa, ON K1S 5B6, Canada.

Micromachines
|March 6, 2025
PubMed
概括
此摘要是机器生成的。

微电机系统 (MEMS) 已经大大进步,影响了许多技术和应用. 在MEMS的持续创新有望进一步整合和跨多个领域的新功能.

科学领域:

  • 工程 工程师 工程师 工程师
  • 材料科学 材料科学 材料科学
  • 物理 物理学 物理

背景情况:

  • 微电机系统 (MEMS) 已经经历了相当大的进化和成熟.
  • MEMS技术在各种技术领域和应用领域都产生了广泛的影响.

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