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Updated: May 24, 2025
Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
R Niall Tait1
1Department of Electronics, Carleton University, Ottawa, ON K1S 5B6, Canada.
微电机系统 (MEMS) 已经大大进步,影响了许多技术和应用. 在MEMS的持续创新有望进一步整合和跨多个领域的新功能.
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Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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