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Updated: Jul 9, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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基于基里加米的微电子机械系统移动波超声波电机的模式优化

Rong Li1, Longqi Ran2, Cong Wang1

  • 1School of Mechanical Engineering, Xihua University, Chengdu 610039, China.

Micromachines
|March 6, 2025
PubMed
概括

基于Kirigami的模式优化显著降低了超声波电机中的移动波扭曲. 这种方法抑制了模态分割和形状扭曲,提高了定位器性能,提高了稳定性和效率.

关键词:
在MEMS MEMS中使用.基里加米 (Kirigami) 是一个古老的城市.优化的优化优化优化.超声波电机的超声波发动机.

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