超表面启用了高阶差异化器

Xiaodong Qiu1, Jingcheng Zhang1, Yubin Fan1

  • 1Department of Electrical Engineering, City University of Hong Kong, Kowloon, Hong Kong SAR, China.

Nature communications
|March 12, 2025
PubMed
概括

研究人员开发了用于任意顺序光学差异化的超表面设备,使先进的图像处理和光学超分辨率成为可能. 这一突破为半导体制造提供了精确的距离估计.

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