高相干超导量子比特的重叠连接点
1National Institute of Standards and Technology, Boulder, Colorado 80305, USA.
概括
研究人员使用in situ Ar削制造了用于超导量子的亚微米约瑟夫森连接点. 这种清洗方法提高了连贯性,简化了制造,为改进量子比特制造铺平了道路.
科学领域:
- 量子计算是一种量子计算.
- 超导电子产品的超导电子
- 材料科学 是一种材料科学.
背景情况:
- 高相干超导量子比特对于量子计算至关重要.
- 制造具有高产量和连贯性的亚微米约瑟夫森连接仍然是一个挑战.
- 现有的方法通常依赖于取决于角度的阴影面罩,限制了可扩展性.
研究的目的:
- 用标准加工技术演示制造亚微米约瑟夫森连接器的方法.
- 为了研究现场Ar削对表面的影响,以形成接口.
- 为了在超导量子比特的约瑟夫森交叉点中实现高连贯性.
主要方法:
- 采用了两步 lithography 和正常角度蒸发.
- 在氧化之前在现场采用 (Ar) 磨来清洁表面.
- 使用电子束光刻和添加过程定义了顶部和底部电极.
主要成果:
- 成功制造了微米以下的约瑟夫森连接器.
- 在Ar磨表面形成的连接处实现了高连贯性.
- 消除了依赖角度的阴影面具的需要,简化了这个过程.
- 与传统的CMOS处理证明兼容,可提高利率和产量.
结论:
- 在表面的现场研磨是制造高连贯性约瑟夫森连接的可行方法.
- 这种技术简化了制造,有利于超导量子比特的可扩展制造.
- 展示的方法支持将先进的量子比特制造与标准半导体处理集成在一起.
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