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Updated: May 22, 2025

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SLowFlowS: 一个新的半导体工艺气体流量标准.

J G Pope1, K A Gillis1, A N Johnson1

  • 1Fluid Metrology Group, Sensor Science Division, National Institute of Standards and Technology, Gaithersburg, MD 20899.

Flow measurement and instrumentation : FMI
|March 12, 2025
PubMed
概括

一个新的半导体低流量标准 (SLowFlowS) 由NIST开发,以准确测量工艺气体. 该标准通过实现精确的气流控制,提高设备产量和吞吐量来改善半导体制造.

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