Rongbang Yang1, Haoming Wei2, Gongbin Tang1

  • 1Institute of Novel Semiconductors, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China.

PubMed
概括

本综述涵盖了薄膜酸 (LiNbO3) 制备方法和设备应用. 薄膜LiNbO3对于光子集成电路至关重要,因为它具有独特的铁电和电光特性.