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在蒸汽沉积过程中可视化五化物流动,使用吸收成像

James E Maslar¹, Berc Kalanyan¹

¹Material Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899, USA.

Applied spectroscopy

|March 13, 2025

概括

一种新的吸收成像技术可视化了原子层沉积中的五化物 (MoCl5) 流动. 这种方法有助于通过分析不同条件下的流动模式来优化前体输送以实现均的薄膜生长.

科学领域:

材料科学材料科学材料科学
化学工程是化学工程的重要组成部分.
光学物理学光学物理学

背景情况:

原子层沉积 (ALD) 和脉冲化学蒸汽沉积 (pCVD) 对于薄膜制造至关重要.
控制前体流动力学对于实现均的薄膜性能至关重要.
在沉积室中可视化前体流动的现有方法是有限的.

研究的目的:

开发和演示一种吸收成像技术,用于实时可视化五化物 (MoCl5) 蒸汽流.
分析载体气体流速和室内压力对MoCl5流动模式的影响.
评估该技术对优化ALD/pCVD过程的有用性.

主要方法:

使用一个远程中心镜头,一个7.1MP CMOS 摄像头和一个443nm LED 光源进行吸收成像.
在沉积室内以每秒大约93的速度记录了MoCl5流动性.
在低和高流量/压力条件下比较MoCl5的流量模式.

主要成果:

低流量/压力条件显示MoCl5的逐渐扩张和短停留时间,导致均的前体前线和高效的排气.
高流量/高压条件显示出高速喷射和再循环区域,导致更长的停留时间和潜在的不均性.
该技术提供了前体流场的定性表征,使用最小的数据处理.

结论:

开发的吸收成像技术有效地可视化了ALD/pCVD中的MoCl5流动力学.
优化的流量条件 (低流量,低压) 促进均的前体输送,以改善薄膜沉积.
该技术的数据可以支持计算流体动力学模型验证和未来的3D分析.

关键词:

吸收成像成像技术的使用.在MoCl5Cl5中.原子层沉积的原子层沉积.化学蒸气沉积化学蒸气沉积流动成像技术的流动成像技术五化物是五化物中的一种.

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