Jihang Liu1, Doris Keh Ting Ng1, Yul Koh1

  • 1Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Innovis #08-02, Singapore 138634, Republic of Singapore.

ACS sensors
|March 13, 2025
PubMed
概括

一个新的压电微膜 (PMD) (H2) 传感器提供高灵敏度和紧的尺寸. 这种新的H2传感器在清洁能源应用中取得了卓越的成绩.