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协同等离子激活低温/SiO₂混合结合没有氧化物接口

Xiaoyun Qi¹, Yufei Bai¹, Han Yan¹

¹State Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin 150001, China.

ACS applied materials & interfaces

|March 14, 2025

概括

(Co) 消极化使高密度设备的强大的混合粘合成为可能. 这种新的方法提高了接口性能,降低了电阻,为先进电子技术的高效通信铺平了道路.

科学领域:

材料科学材料科学材料科学
半导体制造业半导体制造业
纳米技术纳米技术

背景情况:

金属被动化对于先进的混合结合至关重要,克服铜氧化等挑战.
优化被动金属粘合接口和SiO2-SiO2粘合兼容性对于高速,低功耗设备至关重要.

研究的目的:

引入 (Co) 作为混合结合金属.
为了展示Co-Co,Co-SiO2和SiO2-SiO2接口的简单粘合方法.
为了研究协同的NH3/H2O → Ar血处理,同时进行Co降解和SiO2化.

主要方法:

使用一阶段的NH3 / H2O等离子激活来减少和SiO2化.
采用后续的Ar血处理以防止再氧化和水吸附.
实现了表面光滑和无空隙接口结构.

主要成果:

促进原子相互连接,以在200°C时实现同质和异质的结合.
在债券区收益率中表现出1.5倍的提升.
实现了Co-Co界面电阻率的25%降低.

结论:

带有协同激活的被动化混合结合提供了有利的界面性能.
可行的过程适合高密度的集成和高效的通信.
这种方法解决了下一代电子产品混合粘合的关键挑战.

关键词:

科巴尔特是什么意思科巴尔特是什么意思混合型债券是一种混合型债券.氧化物还原的方法协同作用的激活激活.无定向的地形图是指无定向的地形图.

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