概括
一个全新的全固态深紫外线 (DUV) 源在248nm使用非线性频率转换开发. 这种紧而坚固的DUV源为KrF脱激光放大等应用提供了更好的光束质量.
科学领域:
- 光学和光子学 在光学和光子学.
- 激光物理 激光物理
- 非线性光学是非线性光学.
背景情况:
- 开发紧而高效的深紫外线 (DUV) 激光源对于各种科学和工业应用至关重要.
- 现有的DUV源往往在尺寸,强度或光谱纯度方面面临限制.
- 固态激光技术在DUV生成中比传统的气体激光器具有优势.
研究的目的:
- 为了实现一个全固态单频248nm脉冲的DUV源.
- 从DUV源实现高光束质量和连贯性.
- 使用易于获得的基本激光驱动器建立一个紧而强大的DUV生成方法.
主要方法:
- 1064nm基本激光驱动器的多阶段非线性频率转换.
- 从光学参数振荡器 (OPO) 产生355nm第三波和827nm信号波.
- 总频率生成 (SFG) 结合了355nm和827nm源来产生248nm的DUV辐射.
主要成果:
- 在4kHz的重复率下,平均功率约为120mW.
- 获得了4.8ns的脉冲宽度,光束质量因子 (M^2) 低于1.5.5.
- 估计的线宽约为250 MHz,表明单频操作.
结论:
- 一个紧的,坚固的,高效的全固态248nm DUV源成功地被证明.
- 开发的DUV源使用来自单个1064nm驱动器的多阶段非线性频率转换.
- 248纳米的DUV源适合作为KrF排外激光放大器的种子,提高光束质量和连贯性.
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