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Updated: May 22, 2025

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通过第二子显微镜检测Si₃N₄薄膜缺陷的敏感检测

J Lukeš, V Hájková, M Hlubučková

|March 14, 2025

概括

第二波代 (SHG) 提供了一种高度灵敏的方法来检测光学涂层的缺陷. 这种技术在识别薄膜中激光诱导的损伤方面超过了传统方法.

科学领域:

材料科学材料科学材料科学
光学是什么?光学是什么?光学是什么?
纳米技术纳米技术

背景情况:

光学涂层对于光学系统至关重要,但容易受到环境和激光损伤.
可靠和敏感的诊断方法对于评估涂层完整性至关重要.
现有的技术可能无法检测到微妙的,早期的损伤.

研究的目的:

引入和评估第二波生成 (SHG) 作为光学薄膜的敏感诊断工具.
评估SHG在检测缺陷和激光诱导修改方面的能力.
将SHG与光学涂层的既定诊断方法进行比较.

主要方法:

在化 (Si3N4) 薄膜上使用第二波生成 (SHG) 映射.
经过测试的层对激光诱导的损伤值.
将SHG结果与诺马斯基显微镜,白光干扰计和电子显微镜进行比较.

主要成果:

SHG对局部对称度变化表现出高度敏感,揭示了组成,应力和接口的微小变化.
SHG发现了激光诱导的修改,这些修改在标准诊断技术中被忽略了.
降落角度和偏振调节增强了SHG的特征检测.

结论:

二次波生成 (SHG) 是一种强大的技术,用于光学薄膜的敏感缺陷检测.
SHG有效地识别了中心对称材料中早期激光诱导的修饰.
SHG被认为是积极的质量控制和光学涂料损坏评估的理想诊断工具.

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