相关实验视频
Updated: Jul 17, 2026

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Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
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概括
我们使用化 (SiN) 装载的薄膜酸 (TFLN) 微波振器实现了显著的第二波生成 (SHG) 和总频率生成 (SFG). 这种CMOS兼容的方法可以增强芯片上的非线性光子,而不需要蚀刻酸.
科学领域:
- 非线性光学是一种非线性光学.
- 综合光子学 综合光子学
- 材料科学是一种材料科学.
背景情况:
- 薄膜酸 (TFLN) 是集成光子学的一个关键材料.
- 在TFLN平台上实现高效的非线性光学过程,如SHG和SFG,传统上涉及具有挑战性的制造步骤,如干蚀刻.
- 开发CMOS兼容的制造方法对于可扩展的芯片上光子设备制造至关重要.
研究的目的:
- 在TFLN平台上展示高效的第二波生成 (SHG) 和总频率生成 (SFG).
- 探索一种新的制造方法,避免对酸进行干蚀刻.
- 通过微波振器增强来增强非线性光学信号生成.
主要方法:
- 在TFLN波导上装载化 (SiN) 微波振器.
- 优化载有SiN的TFLN结构的波导体几何.
- 为高效的SHG和SFG工艺设计相匹配条件.
主要成果:
- 观察到显著的SHG和SFG信号.
- 实现了高转换效率,SHG的转换效率为16.43%/W,SFG的转换效率为5.90%/W.
- 展示了TFLN光子设备的CMOS兼容的制造策略.
结论:
- 用SiN加载的TFLN微波振器方法使高效的非线性光学信号产生成为可能.
- 这种方法避免了对酸进行干蚀刻的需要,简化了制造.
- 展示的战略为在TFLN平台上大规模集成非线性光子设备提供了一条途径.
相关概念视频
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Wave summation
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