用于非破坏性测试应用的自聚焦高频超声波传感器
Jianxin Zhao1, Jialin Hao1, Dongdong Chen2
1Northwest Institute of Mechanical and Electrical Engineering, Xianyang, 712099, Shaanxi, China.
Scientific reports
|March 15, 2025
概括
一种新型的自我聚焦超声波传感器使用半形压电元件进行高频非破坏性测试 (NDT). 这种创新设计提高了工业缺陷检测的分辨率和效率,特别是在芯片包装中.
科学领域:
- 材料科学 材料科学 材料科学
- 声学 声学 在声学方面
- 非破坏性测试是指非破坏性测试.
背景情况:
- 高频声波对于工业非破坏性测试 (NDT) 非常重要,因为它们的分辨率和灵敏度很高.
- 目前用于高频传感器的聚焦方法,如机械压力和镜头聚焦,可以造成损坏并降低传输效率.
研究的目的:
- 为高频超声波传感器提出并展示一种高效的自我聚焦方法.
- 在NDT应用中克服传统聚焦方法的局限性.
主要方法:
- 采用半形压电元件,以实现在高频率时的自我聚焦.
- 采用精确的微纳米处理技术用于传感器设计和制造.
- 在62.7 MHz的高频率下描述了传感器的性能.
主要成果:
- 成功设计和制造了一种自我聚焦的半形超声波传感器.
- 实现了39μm的优异横向分辨率和76.6%的-6dB带宽.
- 在多层电路板和芯片上展示了出色的成像性能.
结论:
- 自主聚焦的半凸高频超声波传感器显示了对工业无线探测技术的巨大潜力.
- 这项技术对于芯片包装的高分辨率缺陷检测尤其有希望.
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