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Updated: May 21, 2025

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在FIB-SEM中使用Ga离子束创建的材料表面上的量化图案特征

Supriya Ghosh1, K Andre Mkhoyan1

  • 1Department of Chemical Engineering and Materials Science, University of Minnesota, 421 Washington Ave. S.E., Minneapolis, MN 55455, USA.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|March 17, 2025
PubMed
概括

聚焦离子束 (FIB) 参数精确地控制了和酸的表面修饰和纳米尺度模式分辨率. 总离子剂量是关键因素,使得可重复的图案可以降到10纳米.

关键词:
在FIB上,FIB就是FIB.这就是SEM SEM.这是一个声音.离子束光刻 lithography 离子束光刻线的宽度 线的宽度 线的宽度图案设计 图案设计

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相关概念视频

Scanning Electron Microscopy01:07

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
Fundamental Principles
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