基于多聚焦光谱共聚焦方法的接触探头,用于现场测量复杂表面工件的形状和位置错误
Bing Yu1, Qiang Ru2, Anyu Sun1
1State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, People's Republic of China.
The Review of scientific instruments
|March 19, 2025
概括
一个新的接触探测器使用多聚焦光谱对焦技术在现场测量复杂的形状. 这项创新克服了离线检查的局限性,使得半球共振器等工件的精确几何评估成为可能.
科学领域:
- 计量学和仪器仪表技术
- 光学工程是指光学工程.
- 机械工程 机械工程
背景情况:
- 传统的轮测量仪器 (例如,坐标测量机,圆柱体计) 是离线的,并且对于复杂的几何形状而言是有限的.
- 在现场测量复杂工件的形状和位置错误,如半球共振器,仍然是一个挑战.
研究的目的:
- 提出和验证一种新的接触探头,用于现场测量复杂的表面工件.
- 以实时和现场准确评估形状和位置错误.
主要方法:
- 开发一种使用多聚焦光谱共聚焦方法的接触探针.
- 通过镜子检测笔的位置以及对z位移和倾斜的光谱对焦测量.
- 模拟探头动力学 (最大/最小力) 并建立/校准数学坐标模型.
主要成果:
- 使用多聚焦光谱共聚焦方法实现了0.126μm的光学测量精度.
- 成功测量了针标和半球共振器的圆度.
- 验证了接触探头与马赫圆柱体计的有效性,并证明了其在半球共振器现场测量的可行性.
结论:
- 拟议的接触探头有效地在现场测量复杂表面的形状和位置错误.
- 多焦光谱对焦法为几何测量提供了高精度.
- 这项技术为具有挑战性的工件实时检查提供了可行的解决方案.
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