魔幻二氧化用于广泛调节的光子集成电路
Bruno Lopez-Rodriguez1, Naresh Sharma1, Zizheng Li1
1Department of Imaging Physics (ImPhys), Faculty of Applied Sciences, Delft University of Technology, 2628 CJ Delft, The Netherlands.
ACS photonics
|March 24, 2025
概括
研究人员开发了一种新方法来精确控制二氧化的热光学特性,使单个光子芯片上的双向热调节成为可能. 这一突破增强了可调节的光子设备,并减少了热交响.
科学领域:
- 光子学和光学工程的工程.
- 材料科学 材料科学 材料科学
- 集成光学 集成光学 集成光学
背景情况:
- 集成光子电路对于数据通信,传感和光学计算至关重要.
- 可调节和可重新配置的光子元件通常使用热光学效应.
- 标准材料的调节窗口有限,缺乏双向的热调节功能.
研究的目的:
- 开发一种用于光子设备的确定性热光学调的方法.
- 在单个芯片上实现双向热调节.
- 为了提高可调性并减少集成光子设备中的热交叉声.
主要方法:
- 优化了二氧化的沉积条件,使用感应合的等离子体化学蒸汽沉积 (ICPCVD).
- 在无形碳化 (a-SiC),化 (SiN) 和在绝缘体 (SOI) 平台上证明正负波长转移的决定性集成.
- 使用单个加热器制造了一个可调节的合环光学波导 (CROW),并采用低温沉积和升起用于设备隔离.
主要成果:
- 在没有显著的光学损失的情况下,实现了二氧化的确定性热光学调整.
- 在一个单一芯片上,在多个光子平台上展示了双向波长转移.
- 观察到高达10倍的热光学调性和大热环共振器的改善,变化低至1.5 pm/°C.
- 通过设备隔离,减少了至少2个数量级的热交叉声.
结论:
- 为二氧化开发的ICPCVD方法可以精确控制热光学特性.
- 这种技术允许在单个光子芯片上进行双向热调节,这是一个显著的进步.
- 这些发现为新的光子架构铺平了道路,提高了可调性和减少了热交叉声.
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