一个定位模式的微电子机械系统加速度计,具有力量再平衡的闭环控制
Bowen Wang1,2, Zhenxiang Qi1,2, Kunfeng Wang1
1The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Micromachines
|March 27, 2025
概括
一个新的力量再平衡控制方案增强了模式局部共振加速度计 (ML-RXLs). 这一创新显著扩大了ML-RXL的线性测量范围,改善了它们的实际应用.
科学领域:
- 微电机系统 (MEMS) 是指微电机系统.
- 惯性传感技术 惯性传感技术
- 控制系统工程 控制系统工程
背景情况:
- 模式局部共振加速度计 (ML-RXLs) 面临其测量范围的限制.
- 现有的ML-RXL设计在信号线性和动态范围方面扎.
研究的目的:
- 为ML-RXLs提出和验证一个力量再平衡控制方案.
- 解决和克服ML-RXLs固有的测量范围限制.
主要方法:
- 开发用于弱合共振器的经验响应模型.
- 建立一个整体的力量再平衡控制系统模型.
- 基于模拟的灵敏性特征分析.
主要成果:
- 拟议的方案有效地扩大了ML-RXLs的线性测量范围.
- 在±1g范围内实现线性输出,灵敏度为2.94V/g.
- 测量范围至少扩大了6.7倍.
结论:
- 力量再平衡控制方案显著提高了ML-RXL的性能.
- 实现了5.34μg的优化偏差不稳定性和低噪声密度 (3.29μg/rtHz).
- 这一进步使ML-RXL在惯性传感中的应用更广泛.
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