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Updated: May 20, 2025

Laser-induced Forward Transfer of Ag Nanopaste
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使用直接激光写作进行背面对齐的新技术.

Melissa Mitchell1, Siva Sivaraya1, Simon J Bending2

  • 1Department of Electronic and Electrical Engineering, University of Bath, Claverton Down, Bath BA2 7AY, UK.

Micromachines
|March 27, 2025
PubMed
概括

研究人员开发了一种低成本的后侧对齐方法,用于使用直接激光打印机进行微型制造. 这种技术准确地将面具与微电子机械系统 (MEMS) 功能保持一致,克服了传统设备的开支.

科学领域:

  • 材料科学 材料科学 材料科学
  • 电气工程 电气工程
  • 机械工程 机械工程

背景情况:

  • 背面对齐对于微型制造至关重要,特别是在微电子机械系统 (MEMS) 中.
  • 标准的双面面具对齐器对于许多研究机构来说是过于昂贵的.

研究的目的:

  • 为微型制造引入一个具有成本效益的后侧对齐方法.
  • 为了实现精确的面具对齐,使用随时可用的直接激光打印机.

主要方法:

  • 使用晶片样本的角坐标作为对齐特征.
  • 开发了一个转换矩阵,将设计映射到阶段坐标.
  • 在100微米的铜特征上使用光刻法验证了该方法.

主要成果:

  • 实现了23 ± 1μm (x方向) 和8 ± 4μm (y方向) 的平均对齐分辨率.
  • 实现了不到1度的旋转失调.
  • 识别了与非理想样本角影响对齐准确性的挑战.

结论:

  • 直接激光写字器方法为后面面具对齐提供了一个可行的低成本替代方案.
关键词:
在MEMS MEMS中使用.调整对齐的情况微型制造是指微型制造.纳米制造的纳米制造

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  • 这种方法有助于在资源有限的环境中开发微型制造工艺.
  • 对于缺乏利,明确的角落的样品,需要进一步细化.