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使用更高的衍射顺序来提高覆盖测量的精度和稳定性

Shaoyu Liu^1,2,3,4, Yan Tang^1,2,3, Xiaolong Cheng^1,2,3

¹National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.

|March 27, 2025

概括

这项研究通过使用更高的衍射顺序来提高叠加误差测量精度,提高半导体制造精度. 这种新的方法纠正了经验公式错误,使层对齐问题能够更可靠地检测.

科学领域:

光学和光子学在光学和光子学.
半导体制造业半导体制造业
计量学计量学计量学

背景情况:

叠加错误在半导体制造中至关重要,影响设备性能和产量.
目前测量叠加误差的方法通常依赖于具有固有的不准确性的经验公式.
在覆盖计量学中使用更高的衍射顺序为提高精度提供了潜在的途径.

研究的目的:

开发和验证一种用于提高单波长覆盖误差测量性能的新方法.
为了提高半导体层之间的覆盖错误检测的准确性和稳定性.
扩大可用于覆盖测量的可用波长的选择范围.

主要方法:

纳入更高的衍射顺序来纠正从经验公式中的测量错误.
分析不同衍射次序的光强度差异曲线,以精确测量.
专用覆盖误差测量标记器的设计,以提高更高的衍射顺序效率.
使用标尺衍射理论进行理论分析,然后进行矢量衍射和光路模拟.

主要成果:

用更高的衍射顺序来准确测量覆盖误差的可行性.
经验公式错误的纠正,通过对衍射顺序光强度差异的分析.
通过专门设计的标记器提高更高级别的衍射效率.
成功的光路和矢量衍射模拟验证了理论分析.

结论:

拟议的方法显著提高了单波长重叠误差测量的准确性和稳定性.
通过专用标记器实现更高的衍射顺序的使用,克服了现有技术的局限性.
简单的,兼容的双层标记结构显示了在先进的半导体工艺节点中应用的巨大潜力.

关键词:

基于 difraktion 的覆盖层.感谢感谢感谢感谢感谢石版印刷石版印刷石版印刷光学计量学是指光学计量学.

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