基于二维位置敏感探测器及其精度分析的扫描镜基准测试平台

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Hexiang Guo1, Junya Wang1, Zheng You1

  • 1School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.

Micromachines
|March 27, 2025
PubMed
概括

这项研究引入了一个新的基准平台,用于准确测量微电机系统 (MEMS) 扫描镜的性能. 开发的系统精确量化了偏斜角度,共振频率和角分辨率,用于先进的应用.

关键词:
2D-PSD 2D-PSD 是一个 2D-PSD 系统.在MEMS扫描镜中使用MEMS扫描镜准确性分析的准确性分析基准测试平台 基准测试平台 是一个测试平台.

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