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随机离散的dopants诱导的变化源和排水延伸的门-all-around nanosheet FETs:一个量子运输模拟研究研究
Jaehyun Lee1, Tapas Dutta2, Vihar P Georgiev2
1School of Electrical and Electronics Engineering, Pusan National University, Busan, Republic of Korea.
Nanotechnology
|March 27, 2025
概括
在门周围 (GAA) 纳米板FET中的随机离散剂 (RDD) 导致变化. 优化纳米板尺寸和间隔器长度可以减轻RDD诱导的性能降低在先进的晶体管.
科学领域:
- 半导体设备物理学 半导体设备物理
- 纳米技术 纳米技术
- 材料科学是一种材料科学.
背景情况:
- 网关全方位 (GAA) 纳米板场效应晶体管 (FET) 对3nm以下技术节点至关重要,提供了改进的短通道效应缓解.
- 源/排水区域中的随机离散剂 (RDD) 仍然是一个重大挑战,尽管具有多门结构,但会导致设备性能变化.
研究的目的:
- 调查RDD对GAA纳米板FETs源/排水延伸局部变异性的影响.
- 分析设备参数 (如间隔器长度,通道宽度和厚度) 对RDD诱导效应的影响.
主要方法:
- 在弹道运输近似下进行了统计量子运输模拟.
- 关键设备参数包括间隔器长度,通道宽度和通道厚度系统地变化.
主要成果:
- 在S/D扩展中的RDD导致值电压变化,电阻增加,并减少了ON状态电流.
- 具有3nm x 10nm截面和5nm间距长度的GAA纳米板FET显示了10%的ON状态电流减少和0.35μA的变化.
- 由于RDD造成的性能降低是由特定的几何配置加剧的.
结论:
- 在GAA纳米板FET中减轻RDD诱导的变异性需要仔细优化设备几何.
- 建议使用薄而宽的纳米薄板,横截面大,间距长短,以提高设备性能和降低可变性.
相关概念视频
Carrier Transport
The generation of electrical current in semiconductors is fundamentally driven by two mechanisms: drift and diffusion. These processes are essential for the functionality and performance of semiconductor-based devices.
Drift Current:
The drift of charge carriers is started by an external electric field (E). Charged particles, such as electrons and holes, experience an acceleration between collisions with lattice atoms. For electrons, this results in a drift velocity (vd) given by:
Drift Current:
The drift of charge carriers is started by an external electric field (E). Charged particles, such as electrons and holes, experience an acceleration between collisions with lattice atoms. For electrons, this results in a drift velocity (vd) given by:
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In their basic form, enhancement-mode MOSFETs are typically non-conductive when the gate-source voltage (Vgs) is zero. This default 'off' state means no current...
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