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Updated: May 15, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10:25

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

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从异常校正扫描传输电子显微镜对二维材料的原子规模洞察:进展和未来

Woonbae Sohn1, Miyoung Kim1, Ho Won Jang1,2

  • 1Department of Materials Science and Engineering Research Institute of Advanced Materials Seoul National University Seoul 08826 Republic of Korea.

Small science
|April 11, 2025
PubMed
概括

偏差校正扫描传输电子显微镜 (AC-STEM) 提供了对二维材料的原子级洞察力. 这次审查强调了AC-STEM的重点.

关键词:
两维材料是二维材料.晶体结构的结晶结构.缺陷 缺陷 缺陷 缺陷 缺陷不同结构的异构结构.扫描传输电子显微镜扫描传输电子显微镜

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