对MEMS加速器进行动态多轴校准,以评估灵敏度和线性
Luciano Chiominto1, Giulio D'Emilia1, Antonella Gaspari2
1Department of Industrial and Information Engineering and Economics, University of L'Aquila, 67100 L'Aquila, Italy.
Sensors (Basel, Switzerland)
|April 12, 2025
概括
这项研究使用定制测试台校准了微电子机械系统 (MEMS) 加速度计. 校准确定了加速度计的线性和灵敏度,为精确的测量提供了完整的不确定性预算.
科学领域:
- 计量学和仪器仪表技术
- 机械工程 机械工程
- 传感器技术 传感器技术
背景情况:
- 准确的加速度计校准对于可靠的数据采集至关重要.
- 微电子机械系统 (MEMS) 加速度计被广泛使用,但需要精确的校准.
- 现有的校准方法可能无法提供全面的不确定性评估.
研究的目的:
- 为了校准商业三轴MEMS加速度计.
- 开发一个定制的测试台,用于同时进行多轴校准.
- 为校准过程建立一个完整的不确定性预算.
主要方法:
- 使用一个定制设计的测试台,配有旋转桌进行校准.
- 对所有加速度计测量组件的同时评估.
- 从0到8Hz产生精确的参考加速.
- 开发了一个不确定性预算计算的工作模型.
- 进行了对线性和灵敏度的实验不确定性评估.
主要成果:
- 在各种传感器级别上评估MEMS加速度计的线性和灵敏度.
- 每个加速度计确定线性和灵敏度的单个值,分析每个轴.
- 根据校准数据,揭示了可实现的不确定性水平.
- 证明了数据分析方法对不确定性的影响.
结论:
- 定制校准设置为评估MEMS加速度计性能提供了一种可靠的方法.
- 对于描述的校准程序,可以建立一个全面的不确定性预算.
- 了解数据处理对不确定性的影响是准确的传感器评估的关键.
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