在大驱动幅度下,不完美的电容环式MEMS科里奥利斯振动陀螺仪的速度传感性能
Davin Arifin1, Stewart McWilliam1
1Department of Mechanical, Materials and Manufacturing Engineering, University of Nottingham, University Park, Nottingham NG7 2RD, UK.
Sensors (Basel, Switzerland)
|April 12, 2025
概括
本研究检查了科里奥利斯振动陀螺仪 (CVG) 中的静电非线性. 结果显示,带有感应力平衡的闭环系统实现了理想的速率传感性能,特别是在更高的驱动幅度下.
科学领域:
- 机械工程 机械工程
- 电气工程 电气工程
- 传感器技术 传感器技术
背景情况:
- 科里奥利斯振动陀螺仪 (CVG) 对于惯性导航至关重要.
- 静电非线性可能会影响CVG的性能.
- 了解这些非线性效应对于提高陀螺仪精度至关重要.
研究的目的:
- 调查静电非线性对基于环的CVG速度传感性能的影响.
- 在不同的驱动幅度下分析具有8和16个电极的设备.
- 为了比较开环和闭环配置中的性能.
主要方法:
- 在开放和闭环操作中开发CVG的数学模型.
- 分析随着驱动幅度的增加而产生的静电非线性效应.
- 调查非线性频率失衡,驱动/感觉频率软化和参数激发.
主要成果:
- 非线性响应在8和16电极排列之间有显著差异.
- 在开放循环中,16个电极的设计显示出较弱的非线性,因为对驱动幅度的敏感性较低.
- 带有感应力平衡的闭环操作可以在两种电极计数的大驱动幅度下实现理想的速率感应.
结论:
- 闭环CVG中的感应力平衡可以实现理想的速度感应性能.
- 速率传感可以利用感应响应或平衡电压.
- 通过较大的非线性频率不平衡和较低的阻尼,可以实现更好的速率传感性能.
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