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使用偏斜探测器测量系统测量高面积比率微的全截面形状测量
Zhong-Hao Cao1, Jinyan Tang1, Zhongwei Li1
1The State Key Lab of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, China.
Sensors (Basel, Switzerland)
|April 12, 2025
概括
这项研究引入了一种基于偏移的新型扫描方法,以完全测量高比例微槽,克服传统技术的局限性. 新方法通过消除盲点和拼接多次扫描数据来确保完整的配置测量.
科学领域:
- 计量学和测量科学 计量学和测量科学
- 微型和纳米技术 微型和纳米技术
- 机械工程 机械工程
背景情况:
- 测量微沟的传统方法存在盲点,特别是在垂直侧墙及其交叉点上.
- 高视角微道对准确的维度计量学构成重大挑战.
研究的目的:
- 开发和验证一种新的扫描方法,用于测量高比例微槽的完整横截面.
- 消除传统技术固有的盲目测量区域.
主要方法:
- 采用基于偏移的扫描方法,使用大长度对直径比率的探头.
- 通过拼接正反转曲测量得到了完整的配置文件.
- 开发并使用了带有力反和错误分离的四轴测量系统.
主要成果:
- 基于偏移的方法成功地消除了微槽造型中的盲目测量区域.
- 实验验证证明了微槽的全横截面形状测量 (50微米宽,面积比≥3).
- 测量结果实现了82nm的标准偏差和108nm的扩展不确定性.
结论:
- 拟议的基于偏移的扫描方法使高面积比微槽的全面计量成为可能.
- 开发的四轴系统与集成的功能提供了高精度和可靠性.
- 这种技术提高了微观特征的精确表征能力.
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