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Updated: May 13, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

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减小偏差校正的发射率I:在不知偏差系数的情况下对电子显微镜进行偏差校正

Desheng Ma1, Steven E Zeltmann2, Chenyu Zhang1

  • 1School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA.

Ultramicroscopy
|April 13, 2025
PubMed
概括

我们介绍了一个深度学习模型,以最大限度地减少扫描传输电子显微镜 (STEM) 中的电子束发射率增长,以纠正扫描传输电子显微镜 (STEM) 的偏差. 这种方法简化和自动化复杂的过程,使原子级材料分析.

关键词:
异常纠正的纠正异常纠正的纠正波束发射的辐射.机器学习 机器学习传输电子显微镜的使用

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