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在光子造厂中实施光子晶体共振器频率

Haixin Liu, Ivan Dickson, Alin Antohe

|April 15, 2025

概括

化光子晶体共振器使可调节的光学参数振荡器 (OPO) 和单离子微. 这种可扩展的造工厂制造实现了高级纳米光子源的高Q微振器.

科学领域:

综合光子学综合光子学
非线性光学是非线性光学.
材料科学材料科学材料科学

背景情况:

化光子学为先进的光学设备提供了一个可扩展的平台.
光子晶体共振器 (PhCR) 是非线性光学现象的关键组件.
实现高质量因子 (Q) 和精确的分散对于生成光学参数振荡器 (OPO) 和单子微组件至关重要.

研究的目的:

探索在化平台上制造PhCR,用于OPO和单离子微.
为了利用化的可扩展性和精细的特征尺寸来实现低损耗,高Q微振解器.
为了证明这个平台对各种纳米光子源的潜力.

主要方法:

使用AIM Photonics化平台在300毫米晶片上进行造.
纳米级光子晶体结构与700nm化装置层的整合.
通过光子晶体设计精确设计微共振器分散.

主要成果:

已证明的内在微共振器质量因子高达1.2 × 10 ^7.
在近红外的OPO输出频率中实现了广泛的调制性.
由于精确的分散工程,观察到单子频率的形成.

结论:

化平台使得可访问的,光光学图案的纳米光子源.
这项技术促进了频率源的复杂集成.
应用包括光谱学,计量学和通信.

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