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极端紫外线高分辨率光谱仪的光学设计和效率测量,用于未解决过渡阵列研究
Tomoko Kawate1,2,3, Hiroyuki A Sakaue1, Chihiro Suzuki1,2
1National Institute for Fusion Science, 322-6 Oroshi-cho, Toki 509-5292, Japan.
The Review of scientific instruments
|April 18, 2025
概括
开发了一种新的高分辨率光谱仪,用于研究和锡中的未解决过渡阵列 (UTA). 这一进步是融合科学和纳米石墨学应用的关键.
科学领域:
- 原子物理 原子物理
- 频谱学是一种光谱学.
- 血物理学的等离子体物理学
背景情况:
- 许多电子原子的极紫外线 (EUV) 光谱中的未解决过渡阵列 (UTA) 对聚变科学和纳米光刻技术至关重要.
- 精确地描述UTA细结构对于推进这些领域至关重要.
研究的目的:
- 开发和评估一种高分辨率的EUV光谱仪,用于测量UTA细结构.
- 在特定的EUV波长下研究和锡的UTA.
- 实验性地确定用于EUV光谱的大面积格子的衍射效率.
主要方法:
- 开发一个高分辨率的EUV光谱仪,在5和13.5纳米处的分辨率>5000.
- 在UVSOR同步电机设施中对大面积格子的衍射效率进行实验性表征.
- 使用电子束离子陷测量UTA细结构.
主要成果:
- 该光谱仪在5和13.5nm时实现了λ/dλ>5000的分辨率.
- 测量的衍射效率为0.65%±0.07%在5nm (2次序) 和7.9%±0.2%在13.5nm (1次序).
- 对于不同的衍射顺序,在网格上的衍射效率的变化被记录下来.
结论:
- 开发的EUV光谱仪适用于高分辨率UTA测量.
- 关于衍射效率的实验数据为光谱模型提供了关键参数.
- 网格制造和理论计算的进一步细化可能会减少效率预测中的差异.
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