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在基于弹性电极基板的微半球共振器中识别和修剪不平衡质量
Yimo Chen1, Yan Shi2, Xiang Xi3
1College of Intelligence Science, National University of Defense Technology, Changsha, 410073, China.
Microsystems & nanoengineering
|April 23, 2025
概括
这项研究开发了一种方法来识别和减少微半球共振器 (MHR) 中的质量缺陷. 该技术显著抑制了不必要的振动,改善了MHR设备的质量平衡.
科学领域:
- 机械工程 机械工程
- 材料科学 材料科学 材料科学
- 物理 物理学 物理
背景情况:
- 微半球共振器 (MHR) 具有独特的制造和结构特性.
- 精确的质量平衡对于MHR性能至关重要,但由于固有的缺陷而具有挑战性.
- 现有的质量平衡技术需要改进以解决和质量缺陷.
研究的目的:
- 提出一种新的方案,用于识别和修剪MHR中质量缺陷的前三个波.
- 通过解决和失衡,改进MHR的质量平衡技术.
- 开发一种方法来精确减少MHR的缺陷.
主要方法:
- 设计了一种多式弹性电极基板,以检测前三个波.
- 开发了一种振动分解方法来提取波响应信号.
- 使用有限元模拟用于方案验证.
- 采用激光振动计和秒激光切除用于实验性识别和修剪.
主要成果:
- 成功地识别和修剪了质量缺陷的前三个波.
- 实现了显著的减少:92.8%的第1,89.3%的第二和75.5%的第三和.
- 由于质量不平衡而导致的有效抑制的摆动模式和Z轴转换模式.
- 通过模拟和实验制造验证了拟议的方案.
结论:
- 拟议的方案有效地识别和修剪MHR的和质量缺陷.
- 开发的方法显著提高了MHRs中的质量平衡精度.
- 这项工作提供了一种实际的解决方案,通过精确的质量缺陷减少来提高MHR性能.
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