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Updated: May 10, 2025

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研究优化压力和提高MEMS陀螺仪的性能方法,基于杆板结构

Yunbin Kuang1, Xiaoyan Huo1, Weitao Guo2

  • 1Shijiazhuang Campus, Army Engineering University of PLA, Shijiazhuang 050003, China.

Micromachines
|April 26, 2025
PubMed
概括

一个新的悬臂板结构有效地降低了微电机系统 (MEMS) 蝶陀螺仪中的热应力. 这项创新显著提高了陀螺仪的性能,通过降低压力和提高在温度变化中偏差稳定性来最大限度地降低压力.

关键词:
在 MEMS 陀螺仪上使用旋转镜.偏见的歇斯底里是存在的.悬臂板结构结构可以杆板结构.频率偏移是指频率偏移的情况.热应力是一种热应力.

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