MEMS

Jiacheng Li1,2, Junpeng Wang1,2, Chunrong Peng1,2

  • 1State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

Micromachines
|April 26, 2025
PubMed
概括

一个新的MEMS 3D电场传感器与直角电极抑制干扰. 与传统技术相比,这种新型传感器和解方法显著提高了测量精度.