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低噪声输入通过补偿电路设计用于共振MEMS压力传感器

Jialuo Liao¹, Pinghua Li¹, Jiaqi Miao¹

¹College of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

|April 26, 2025

概括

本研究介绍了一种低噪音的电荷放大器和输入补偿电路,以提高共振压力传感器的精度. 新设计显著减少噪音和抑制干扰,提高传感器的整体性能.

科学领域:

电气工程电气工程
传感器技术传感器技术
测量科学测量科学测量科学

背景情况:

响应式压力传感器中的输入效应会引起噪音,降低性能.
现有的传感器测试系统由于这种干扰而降低了灵敏度和线性.

研究的目的:

为高精度压力传感器测量设计具有输入补偿的低噪音电荷放大器.
为了减轻输入现象对传感器准确性的不利影响.

主要方法:

开发了一种改进的充电放大器,配备了差异常源输出缓冲器,以减少噪声和增加输入阻抗.
创建了一个基于传感器等效电路建模和输入效应分析的输入补偿电路.
进行实验测试以验证电路在抑制输入信号方面的有效性.

主要成果:

对充电放大器的噪声功率光谱密度 (26.74nV/√Hz) 实现了65%的降低.
成功消除了由输入电容器引起的34,919 Hz干扰频率.
将压力传感器的共振峰值降低了8dBV (-40.75dBV),提高了信号清晰度.

结论:

设计的电路有效地抑制了共振压力传感器中的输入干扰.
传感器测试系统的测量精度大大提高.
为开发低噪音,高精度和可靠的传感器测试系统提供了基础.

关键词:

充电放大器充电放大器的功率是什么通过料效应通过效应.噪音优化优化噪音优化一个共振压力传感器.

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