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Updated: May 10, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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半球共振器中质量缺陷的修剪策略,基于多子分析

Yimo Chen1, Fanrui Kong1, Kai Zeng1

  • 1College of Intelligence Science, National University of Defense Technology, Changsha 410073, China.

Micromachines
|April 26, 2025
PubMed
概括

这项研究为半球共振器引入了一种新的离散修剪方案,在第一个波修剪过程中显著减少频率分割变化. 这种方法通过提高修剪效率和尽量减少损坏来增强质量平衡技术.

关键词:
频率分割是一种频率分割.一个和的和.一个半球共振器.离子束蚀刻 离子束蚀刻质量缺陷 质量缺陷

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