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一个3D直流电场测量仪,基于使用高度敏感方案包装的传感器芯片

Pengfei Yang¹, Xiaolong Wen², Xiaonan Li¹

¹Beijing Key Laboratory for Sensors, School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China.

|April 26, 2025

概括

一个新的3D电场计 (EFM) 使用MEMS技术提高稳定性和灵敏度. 这种无线设备的灵敏度比以前的设计高4.64倍以上,在各种条件下具有出色的准确性.

科学领域:

电气工程电气工程
材料科学材料科学材料科学
传感器技术传感器技术

背景情况:

精确测量直流电场在各种科学和工业应用中至关重要.
现有的基于MEMS的电场计面临着灵敏度,稳定性和地面潜在干扰的挑战.

研究的目的:

开发一种具有提高灵敏度,稳定性和精度的新型3D直流电场计 (EFM).
克服现有的MEMS EFM的局限性,特别是地面潜在效应和振动干扰.

主要方法:

在3D配置中使用了三个相同的1D MEMS芯片.
在MEMS芯片设计中内置了刚性框架和条形梁,以保持振动稳定.
实施的内凸包装盖可以提高灵敏度和无线传输,以消除潜在的地面冲击.

主要成果:

实现了至少比之前报告的MEMS 3D EFMs高4.64倍的灵敏度.
在所有旋转态度中显示了2.2%的最大相对偏差.
即使在高湿度条件下,线性也保持在1%以内,单轴分辨率低于10V/m.

结论:

拟议的3D MEMS EFM在电场测量技术方面取得了重大进展.
综合设计和新型MEMS结构提供了卓越的性能,准确性和可靠性.
该设备适用于需要精确直流电场检测的苛刻应用.

关键词:

3D电场测量仪 3D电场测量仪在MEMS MEMS中使用.一个高度敏感的包裹.防潮包装结构的包装结构传感器芯片传感器芯片

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