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相关概念视频

Electronic Distance Measuring Instruments01:30

Electronic Distance Measuring Instruments

Electronic Distance Measuring Instruments (EDMs) are essential tools in modern surveying, offering precise distance measurements by emitting electromagnetic signals and calculating the time required for these signals to travel to a target and return. Two primary types of signals are used in EDMs — light waves and microwaves — each suited to specific environmental and distance requirements. Light-wave-based EDMs utilize either infrared or laser light, providing high accuracy over short distances...

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相关实验视频

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Development of Whispering Gallery Mode Polymeric Micro-optical Electric Field Sensors
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一个3D直流电场测量仪,基于使用高度敏感方案包装的传感器芯片.

Pengfei Yang1, Xiaolong Wen2, Xiaonan Li1

  • 1Beijing Key Laboratory for Sensors, School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China.

Micromachines
|April 26, 2025
PubMed
概括
此摘要是机器生成的。

一个新的3D电场计 (EFM) 使用MEMS技术提高稳定性和灵敏度. 这种无线设备的灵敏度比以前的设计高4.64倍以上,在各种条件下具有出色的准确性.

关键词:
3D电场测量仪 3D电场测量仪在MEMS MEMS中使用.一个高度敏感的包裹.防潮包装结构的包装结构传感器芯片 传感器芯片

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相关实验视频

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科学领域:

  • 电气工程 电气工程
  • 材料科学 材料科学 材料科学
  • 传感器技术 传感器技术

背景情况:

  • 精确测量直流电场在各种科学和工业应用中至关重要.
  • 现有的基于MEMS的电场计面临着灵敏度,稳定性和地面潜在干扰的挑战.

研究的目的:

  • 开发一种具有提高灵敏度,稳定性和精度的新型3D直流电场计 (EFM).
  • 克服现有的MEMS EFM的局限性,特别是地面潜在效应和振动干扰.

主要方法:

  • 在3D配置中使用了三个相同的1D MEMS芯片.
  • 在MEMS芯片设计中内置了刚性框架和条形梁,以保持振动稳定.
  • 实施的内凸包装盖可以提高灵敏度和无线传输,以消除潜在的地面冲击.

主要成果:

  • 实现了至少比之前报告的MEMS 3D EFMs高4.64倍的灵敏度.
  • 在所有旋转态度中显示了2.2%的最大相对偏差.
  • 即使在高湿度条件下,线性也保持在1%以内,单轴分辨率低于10V/m.

结论:

  • 拟议的3D MEMS EFM在电场测量技术方面取得了重大进展.
  • 综合设计和新型MEMS结构提供了卓越的性能,准确性和可靠性.
  • 该设备适用于需要精确直流电场检测的苛刻应用.