阿托法拉德级超高容量分辨率电容读出电路
Guoteng Ren1,2, Saifei Yuan3, Jingjing Peng3
1College of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China.
Sensors (Basel, Switzerland)
|April 26, 2025
概括
本研究介绍了一种超高容量分辨率的电容读出电路,用于精确的微振测量. 这种新的设计可以达到极高的精度,这对于先进的加速度计至关重要.
科学领域:
- 电气工程 电气工程
- 传感器技术 传感器技术
- 仪器化 仪器化 仪器化
背景情况:
- 高精度加速度计需要低噪声电容检测.
- 微振测量和导航需要先进的传感器电子设备.
研究的目的:
- 设计和测试超高容量分辨率电容读出电路.
- 为了实现MEMS加速度计的极高精度.
主要方法:
- 使用差电荷放大器进行初始电容检测.
- 实施频域调制以减轻低频噪声.
- 采用差分减法和改进过,以减少常态和最后阶段的噪声.
主要成果:
- 在1MHz载波频率下达到0.103aF/Hz1/2的电容分辨率.
- 已经证明了25.6μg/Hz1/2.2.的最低噪声.
- 验证了电路适用于高精度,低噪音的MEMS加速度计的适用性.
结论:
- 设计的电容读出电路满足了对微震感应的严格要求.
- 电路的性能对于下一代导航和测量系统至关重要.
- 通过先进的电路设计,在电容传感方面可以达到达法拉德级别的精度.
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